Used ASML PAS 5500/400D for sale
At fabsurplus.com, we are currently representing the following used ASML i-line scanner for sale on behalf of our client:-
https://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=106962
-Stored in the cleanroom -Not currently operational
-Missing parts list:-
1.Wafer stage
2.Reticle Stage
3.WPS unit
4.WTS
5.Rema Blade unit
6.Off Access alignment
7.ARMS grippers
8.Level sensor
The lens has been assessed. It has been found that the lens is not effected by the other missing parts the tool has.The lens has been kept under N2 purge, and it is judged that the top and bottom module condition should be OK.
Optional equipment:-
Std TTL + RBA +Ahena + Single and multi Reticle pod
Config
Four Cassette Indexers???????????????????????9428.999.61010
Wafer Track Interface???????????????????????9428.999.61050
TAPE STREAMER?FO???????????????????????????9428.999.61510
STEPPER SECS I AND SECS II???????????????????9428.999.61100
SINGLE RETICLE SMIF HANDL. FO???????????????9428.999.61290
FOUR CASSETTE INDEXERS???????????????????????9428.999.61010
SIGNAL TOWER EXTERNAL ASSY???????????????????9428.999.51200
24 CHARACTER BARCODE FO???????????????????????9428.999.66170
SMIF BASED WHC (PORT 1&2 SMIF)???????????????9428.999.66430
SMIF BASED WHC (PORT 3&4 SMIF)???????????????9428.999.66450
IRIS-6 INCH RETICLES FO???????????????????????9428.999.61650
TAG READER ASYST ST8400 FO???????????????????9428.999.72430
25M HOSE & CABLE SET /400???????????????????9428.999.51280
PEP IMAGE STREAMING PACKAGE FO???????????????9428.999.66740
TIN WAFERTABLE-NOTCH-8 INCH FO???????????????9428.999.72340
FOCUS SPOT MONITORING?FO???????????????????9428.999.61500
SLOT/BACK INTEGRITY (200MM) FO???????????????9428.999.66410
WAFER TRACK INTERFACE???????????????????????9428.999.61050
SIGNALL???????????????????????????????????????9428.999.61590
SECS JOB CREATOR???????????????????????????9428.999.61310
RETICLE CD CORRECTION???????????????????????9428.999.61980
METROLOGY DATA INTERFACE FO???????????????????9428.999.61790
SMIF BASED WHC (4 PORTS SMIF)???????????????9428.999.66420
SMIF BASED WHC (PORT 1&4 SMIF)???????????????9428.999.66440
领英推荐
TEST STREAMING?FO???????????????????????????9428.999.72780
RETICLE SMIF POD TAG READER FO???????????????9428.999.61280
EXTENDED EXPOSURE???????????????????????????9428.999.61960
4 COLOR MACH. STATUS LAMP ASSY???????????????9428.999.51400
TIN WAFERTABLE-FLAT-8 INCH FO???????????????9428.999.72330
CD-FEC/LOP?FO???????????????????????????????9428.999.73100
Functionality initially available as Field Upgrade??????????????????????????
ATHENA NARROW MARKS (HW PREP) UF???????????9428.999.75510
MaskTools??????????????????????????
LITHOCRUISER W/NA-SIGMA & OPC?OPTIMIZER???9428.999.96040
MASKRIGGER FULL-CHIP RULE OPC???????????????9428.999.96050
MASKWEAVER W/CPL POLY LAYER OPTION????????????9428.999.96060
SCATTERING BARS MANUF.LICENSE/FAB???????????9428.999.96070
Standard Specifications:-
-Designed for 0.28 um production
-i line step and scan system
-1/4 reduction ratio
-ARIEL illuminator allowing continuously variable, automatically selectable conventional and off-axis illumination modes for maximum process latitude on all features and circuit layers.
-ATHENA advanced phase grating alignment
-Large field size, better Cd control
-Slit projection, giving low lens aberrations, high NA
-IRIS reticle inspection system (Optional)
-AERIAL illuminator giving >= 3500 mW/cm2 conventional illumination, and >=2750 mW/cm2 annular illumination
>= 124 wph (200 mm) with 200 mj/cm2 dose 46 exp
-NA Variable 0.48 to 0.60
-Resolution less than 350 nm
-Max. Field size X/Y 26 x 33 mm
Overlay Single machine <= 30 nm
Overlay Matched Global <= 50 nm
Distortion Conventional <= 30 nm
Distortion Annular?????<= 30 nm
Interested parties can contact me as following:-
SDI Fabsurplus Italia SRL Stephen Howe
Company Owner
email: [email protected]
Mobile (Italy) : +39 335-710-7756
Mobile (USA) : +1 830-388-1071
WWW.FABSURPLUS.COM
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