T-ray can see more... Example: Isosurface

An isosurface is a surface of constant value of a physical property, such as the dielectric constant, in a three-dimensional volume. The isosurface separates regions less than a given “isovalue” from regions greater than the same isovalue. All points on the isosurface have the same value (the isovalue). This is a convenient way to visualize the distribution/ arrangement of a given material within a volume, defined by its isovalue, computed from the measured terahertz reflectance. An example is given below.

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Fig. 1. T-ray volume image of a segment of a patterned wafer (low resolution).

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Fig. 2. Isosurface image of the patterned wafer in Fig. 1. Material distribution with identical dielectric constant is shown.

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Fig. 3. The same isosurface as Fig. 2, from a different angle of view.

Summary

Isosurface analysis is a convenient way to assess materials distribution of similar properties within a given volume. T-ray volume images are suitable for such analysis.

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