Revolutionizing Precision with High-Speed Imaging: Computational Vibration Mitigation and the HZ-2000-G Camera

In the realm of digital holographic microscopy (DHM), the need for ultra-precise measurements is paramount, especially in the semiconductor industry, where overlay metrology plays a crucial role in ensuring accurate multilayer wafer alignment. However, the challenge of mechanical vibrations has long been an obstacle, often degrading measurement precision. Enter computational vibration mitigation—a game-changing technique that corrects these vibrations in real time.

One of our innovative customers is leveraging the powerful capabilities of Emergent Vision Technologies’ HZ-2000-G camera with the Gpixel GSprint sensor to implement a phase-interpolated vibration correction in DHM. This patented technique involves capturing a series of holograms at high frame rates, tracking phase fluctuations over time, and applying computational corrections to eliminate fringe contrast loss caused by vibrations. The result? A tenfold increase in precision for overlay metrology measurements!

But why is the HZ-2000-G camera the perfect fit for this sophisticated application?

Unmatched Speed and Accuracy The HZ-2000-G, equipped with the Gpixel GSprint4502 CMOS sensor, offers blistering frame rates of up to 1782 fps at 10-bit mode or 3462 fps at 8-bit mode. In this specific application, it operates at 1000 fps in a 10-bit mode, enabling it to capture the necessary data quickly enough to track and correct phase variations caused by vibrations. Its global shutter ensures that no image details are lost during rapid movement, which is critical in applications that demand precision.

Optimized for High-Speed, High-Volume Data In an application where nanometer-scale precision and high-volume data processing are the norms, the HZ-2000-G’s high-speed GigE Vision interface allows for seamless integration into complex systems requiring massive data throughput without frame drops. Its compatibility with GPU Direct also ensures rapid and efficient data processing, essential for the high-demand environment of semiconductor manufacturing.

The Perfect Match for Vibration Mitigation Computational vibration mitigation requires a camera that not only captures high-speed data but also performs reliably under strenuous conditions. The robust design of the HZ-2000-G, paired with its low noise, global shutter, and high frame rate, makes it the ideal choice for this application, where maintaining fringe contrast and accurate phase measurements are crucial to improving metrology precision.

Looking Forward: A New Era of Precision The combination of computational vibration mitigation and high-speed imaging, enabled by the HZ-2000-G, opens up new possibilities for overlay metrology and beyond. As industries like semiconductor manufacturing push the limits of technology, the importance of precise, reliable measurements will only grow. Emergent Vision Technologies is proud to support customers at the cutting edge of innovation, providing them with cameras that meet the most demanding requirements.

The future of precision imaging is here, and with the HZ-2000-G, we’re excited to see what’s next.

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