Handling components for semiconductor production

Cleanliness as a success factor

Meticulous cleanliness is essential in semiconductor production. Clean rooms play an important role and the choice of the right handling components is crucial.

Clean rooms are particularly important in electronics manufacturing. It is not always necessary to create completely shielded production environments for this, as technical and operational measures are often enough to protect workpieces and products from unwanted particles. The properties of the handling components used also play an important role here.

Particles that impair the cleanliness of the cleanroom can be released during the handling of parts in particular. It is therefore crucial that grippers and the like are specially designed for use in cleanrooms and meet the relevant requirements. The TüV certification according to DIN EN ISO 14644-1, for example, provides guidance on the cleanroom suitability of automation components. This certification provides information on the particle density and emission and divides cleanrooms into different classes. The decisive factor here is the degree of cleanliness of the air; this refers to the maximum permissible particle concentration in the air and the particle size. Cleanrooms are assigned to classes ISO 1 to 9, whereby cleanliness class 1 with a maximum low particle concentration is the cleanest.

Small parts grippers with cleanroom certification

As a handling specialist and partner to many pharmaceutical and electronics companies, Zimmer Group now offers over 500 grippers and clamping elements with low particle emissions in accordance with the international standard DIN EN ISO 14644-1 for cleanroom classes between 2 and 6. This includes the small parts gripper from the GEP2000 series.

With its compact design, this gripper is versatile and, thanks to its certified cleanroom class 2 and electric drive, is suitable for handling electrical components, e.g. when loading wafers into the magazine or for pick and place applications with electrical chips. It has an emergency release and mechanical self-locking as standard, so that workpieces are held securely in the gripper at all times - even in the event of a power failure or emergency stop.

The integrated IO-Link connection also offers simplified implementation in communication, flexible positioning and uncomplicated control. There is also automatic part detection, which immediately detects deviations from the GEP2000. Parts can be sorted out immediately. As the sealed guides are lubricated with a food-safe H1 grease, it is versatile - even for applications in the food industry. The top cover and retaining screws are made of stainless steel to optimize both corrosion protection and ease of cleaning. The grippers can also be fitted with a protector that increases the protection class to IP 54.

The compact gripper is used, for example, in electronics handling for the assembly of extremely small components (surface mounted devices) on printed circuit boards or sensitive pick and place applications for delicate components. But the advantages of the GEP2000 are also evident in wafer handling during loading into the magazine.

Customer-specific adaptation

While the GEP2000 already comes with a number of features as standard and is used as a versatile standard component, the Zimmer Group also develops special solutions for customer-specific applications. For example, a special gripper with a hygienic design was created according to a customer's specifications based on the tried-and-tested GEP2000. Hydrogen peroxide-resistant materials and the housing made of stainless steel, PEEK and PET enable easy cleaning for increased hygiene requirements. In addition, the reduced particle emission guarantees safe use in clean rooms.

Suitable components for semiconductor production

Highly sensitive production systems, such as the production of sensitive silicon wafers in semiconductor manufacturing, require maximum precision and care. Even a minimal deviation can have devastating effects and lead to enormous financial losses. The choice of material also plays a role: components made of stainless steel or plastic are more suitable than those made of aluminum or brass. Careful planning and selection of handling components therefore make a significant contribution to cleanliness in cleanrooms.

Zimmer Group is not only involved in semiconductor production with cleanroom grippers. With a wide range of products along the entire value chain, from wafer handling, testing and assembly to downstream logistics, the automation specialist offers end-of-arm solutions such as grippers and tool changers, as well as clamping elements, accessories and industrial shock absorbers.

Author information: Johanna Pompe, Editorial Office & Content Editor, Zimmer Group