Enhancing Legacy Equipment with SECS/GEM Automation: The Plug-n-Play Solution

Legacy semiconductor equipment often lacks SECS/GEM capabilities, hindering factories from maximizing yield, cycle time, and Industry 4.0 benefits. Integrating SECS/GEM functionality has traditionally been challenging due to various reasons such as outdated OEM support or costly equipment upgrades. However, there is a solution that eliminates these obstacles and enables seamless integration of SECS/GEM capabilities. Enter the Plug-n-Play SECS/GEM solution, which leverages the equipment PC's peripherals and advanced technologies like computer vision, AI, and ML to unlock the potential of legacy equipment.

Overcoming the Challenges:

The conventional "EIGEMBox" approach for adding SECS/GEM capabilities to legacy equipment has its limitations and safety concerns. Lack of I/O information, equipment freeze, and limited functionality restrict the effectiveness of this method. However, the Plug-n-Play SECS/GEM solution offers a much safer and efficient alternative.

Harnessing Equipment PC's Peripherals:

By utilizing the peripherals of the equipment PC, SECS/GEM capabilities can be seamlessly integrated. Leveraging computer vision, AI, and ML technologies, data can be extracted from the equipment's controller GUI and transmitted to factory hosts in SECS/GEM format. Furthermore, remote control functionalities like PP-SELECT, START, and ABORT commands can be executed using the equipment PC's mouse and keyboard interfaces.

Advancing Automation Capabilities:

The integration of AI/ML and computer vision technologies opens doors to enhanced automation capabilities beyond traditional SECS/GEM standards. Possibilities include sending images of wafer measurements or inspections to factory hosts, enabling Robotic Process Automation (RPA) capabilities for task automation, and facilitating remote desktop access to semiconductor equipment without compromising network security protocols typically enforced in fabs.

Benefits and Advantages:

The Plug-n-Play SECS/GEM solution offers numerous benefits to factories with legacy equipment. It eliminates the need for costly OEM purchases and modifications, reduces downtime associated with equipment upgrades, and ensures a smooth integration process without adverse side effects. Moreover, by leveraging advanced technologies, factories can enhance automation capabilities, improve data acquisition, and unlock new opportunities for process optimization.

Don't let the limitations of legacy equipment hold back your semiconductor manufacturing operations. The Plug-n-Play SECS/GEM solution provides a cost-effective and efficient way to add automation capabilities to your existing equipment. Experience the benefits of SECS/GEM standards, enhanced by AI/ML and computer vision, and take a step towards achieving higher yields, improved OEE, and Industry 4.0 capabilities. Contact us today to explore how this innovative solution can transform your semiconductor manufacturing process.