Double Gold successfully developed ultra-high purity 316L steel for gas pipe valve components of semiconductor equipment

New Nenergy, new nuclear power, new materials.

Suzhou Double Gold Industry (formerly Suzhou Stainless Steel Material Factory, founded in 1992) is a national-level "little giant" enterprise that is specialized, refined, unique and innovative. It has first-class metallurgical technologies and equipment such as VIM, VAR and PESR as well as conventional IF+AOD+LF+ VD/VOD. The special function super alloy smelting adopts VIM+VAR double vacuum smelting process and VIM+PE SR+VAR triple process smelting production.

316L semiconductor gas pipe valve steel has the following performance characteristics:

· Excellent corrosion resistance: 316L stainless steel has a lower carbon content than 316 steel and better resistance to intergranular corrosion, and can be safely used in corrosive environments such as those containing halogen ions. It can resist corrosion from a variety of chemicals, ensuring that in environments with extremely high purity requirements such as semiconductor manufacturing, will not contaminate the gas or affect system performance because of corrosion .

· Good welding performance: no post-weld annealing is required.

· High strength: With a certain strength, it can withstand the pressure and stress in the semiconductor manufacturing process.

· Stable performance: Under various temperature and environmental conditions, it can maintain good physical and chemical properties to ensure the long-term stable operation of the valve.

· Precise flow control: It can achieve precise control of gas flow and meet the strict requirements of semiconductor process for gas flow rate.

· Low particle generation: Very few particles are generated during use, which reduces the impact on the quality of semiconductor products.

316L semiconductor gas pipe valve steel has a wide range of applications, mainly including the following aspects:?

1. Integrated Circuit Manufacturing

· Various gas delivery and control valves and fittings used in the wafer manufacturing process, such as the delivery systems of inert gases (nitrogen, argon) and reactive gases (such as hydrogen, oxygen, hydrogen chloride, etc.).

· The Gas control components in process equipment such as etching and deposition,?to ensure accurate gas supply and exhaust.

2. Flat panel display manufacturing

· as lines and valves for chemical vapor deposition (CVD) and physical vapor deposition (PVD) equipment used in LCD panel manufacturing.

· Control gas flow and pressure to ensure uniformity and quality of thin film deposition.

3. Solar cell manufacturing

· In the production of crystalline silicon solar cells, it is used for gas delivery and control in processes such as diffusion and coating.

· For example, to control the amount and time of gas such as phosphorus source and boron source.

4. LED Manufacture

· Provide reliable pipes and valves for the gas supply system in epitaxial growth and chip manufacturing processes to ensure gas purity and flow accuracy.

5. Semiconductor packaging test

· In the gas protection and purification system during the packaging process, pipes and valves made of 316L steel can effectively control the gas environment.

6. Semiconductor equipment manufacturing

· It is a key material for manufacturing semiconductor production equipment, such as gas pipelines and valve components inside equipment such as etching machines and photolithography machines. For example, in the photolithography process of integrated circuit manufacturing, gas pipe valves made of 316L steel can accurately control the flow and pressure of special gases required during the photoresist exposure process, thereby ensuring photolithography accuracy and chip quality. In the plasma enhanced chemical vapor deposition (PECVD) process of flat panel display manufacturing, pipe valves made of this steel can stably transport reactive gases to ensure the quality and uniformity of the film.

Common uses of 316L semiconductor gas pipe valve steel include:

1、Gas delivery pipelines

Used to deliver high-purity gases required in various semiconductor manufacturing processes, such as nitrogen, argon, hydrogen, etc., to ensure that the gas is not contaminated during the transmission process.?

2. Valve components

· The valve body, valve stem and valve core of ball valves, stop valves, diaphragm valves, etc., accurately control the flow and on-off of the gas.

· For example, in the wafer etching process, it is used to control the entry and stop of etching gas.

3. Seals

· Ensure the sealing performance of gas pipe valves to prevent gas leakage.

4. Gas filter components

· Used to manufacture the outer shell and internal structure of the filter to filter out impurities and particles in the gas.

5. Connection components of the reaction chamber

· Connect the reaction chamber to the gas supply system to maintain a stable gas environment in the chamber.

6. Gas diversion device

· Ensure that the gas is evenly distributed to different process links.

In the field of semiconductor manufacturing, which has extremely high requirements for the purity, chemical and physical stability of the process environment, the performance characteristics of 316L stainless steel make it an ideal material for manufacturing gas pipe valves, which helps to improve the quality and production efficiency of semiconductor products. Its specific application varies according to different valve types and process requirements. In addition, in actual applications, the chemical composition and inclusions of 316L steel are extremely stringent, requiring precise composition control and strict quality testing to meet the high requirements of the semiconductor industry.

With long-term experience in producing high-temperature alloys, precision alloys, and high-quality special steels, and extensive research in metallurgy, forging, rolling, and corrosion, as well as wide applications including VIM, PESR, VAR, etc., Suzhou Double Gold?Industry can adopt a variety of metallurgical processes to produce 316L: VIM+VAR, VIM+PESR+VAR, IF+VOD+LF+ESR. Through fine forging and solid solution processes, 316L stainless steel has excellent performance in the field of semiconductor applications, meeting the different needs of different industrial application fields for high-performance materials. Recently, Suzhou Double Gold?Industry has successfully developed high-cleanliness and high-strength 316L semiconductor gas pipe valve steel through the selection of raw materials, two refining, forging and rolling, solid solution treatment, cold drawing and strengthening, and strict quality control and testing throughout the production process. It has excellent performance and meets the high standards of semiconductor gas pipe valves.

The composition, performance and corrosion report are as follows:?

1、Chemical composition: The content of carbon, phosphorus, sulfur, aluminum and harmful residual elements is extremely low.

2、Gas content:

Gas content was tested by Jiangsu Tianding on samples taken from rolled materials: [H] 0.6ppm, [O] 11ppm, [N] 25ppm, and the gas content was extremely low.

3、The non-metallic inclusion test?was qualifies after testing in?Gangyan Nake

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After solution and cold drawing, 316L has a very high cleanliness?after inspection and analysis of inclusions by Jiangsu Steel Research Institute Co., Ltd.,

4、 the intergranular corrosion test result was qualified?in Suzhou Yance Physical and Chemical Testing Co., Ltd.,

5、The hardness reached HV282, qualified,after testing?in?Shenzhen Landong Precision Co., Ltd.,

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6、Grain size 7, qualified

7、After solution treatment and cold rolling,the 316L mechanical properties test results are as folows：

Dedicated to the manufacturing industry, growing with you!

Double Gold company?has been focusing on the research and production of various special function alloy bars and forgings for 32 years, forming a complete production system from metallurgy-forging-heat treatment-metal processing to perfect testing and quality assurance, and is committed to providing safe and reliable products for global nuclear power, semiconductors, aerospace and high-end equipment manufacturing.

Welcome to visit us!

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Katherine

Suzhou Double Gold Industry Co.,Ltd.

Website：www.szdoublegold.com

Tel：0512-65350333/ +8616605198827

Add.: No. 478, Songshan Road, New District, Suzhou Jiangsu China

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