BIG METROLOGY - LittleFoot
LittleFoot-CD

BIG METROLOGY - LittleFoot

Ultra-High Resolution & Ultra-High Sensitivity Scatterometer for Optical Critical Dimensions and Multilayer Thin Film Measurements. Efficiently Designed in a Reduced Footprint for 200 mm and 150 mm Wafers.

FULLY AUTOMATED, HIGH THROUGHPUT OPTICAL METROLOGY SYSTEM FOR SEMICONDUCTOR APPLICATIONS. APPROXIMATELY 40% REDUCTION IN FOOTPRINT COMPARED TO OTHER SEMICONDUCOTOR METROLOGY TOOLS.

John Mahoney?C4Technology, LLC 11760 W Executive Dr. Suite 220?Boise, ID 83713 USA 208-867-4876 [email protected]

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