Aluminum Alloy for Semiconductor Chambers
Imran Zhang
??Vendor of 5-axis CNC machined products, ??with 6 casting plants of ss and super-alloy materials.
Aluminum Alloy for Semiconductor Chambers
Aluminum alloy has been a primary choice when choosing the material for building the chambers of semiconductor components.
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A coating of aluminum dioxide can be easily formed when the aluminum meets the air. This thin coating provides an amour against most contaminant. Besides, most treatment can be conducted upon the aluminum alloy depending on the required properties. So that protections for the semiconductor can be procured in various degree.
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Additionally, compared to stainless steel, aluminum is more tamperproof. For instance, after the precision milling and assembly, the chamber provides airtightness. The whole semiconductor part can be sealed in inert gases, thus keeping the stability and longevity of the whole assembly.
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These properties make aluminum an optimal choice for semiconductor chambers.
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