Journal of Vacuum Science & Technology

In this study, an alternative P-precursor, TDMAP, is used to deposit metal phosphates. Aluminum phosphate was fully characterized, and researchers from CoCooN - Conformal Coating of Nanomaterials, Helmholtz-Zentrum Dresden-Rossendorf (HZDR), & imec report on its use as a battery coating material. #ALDep https://lnkd.in/ebBsyU_n

Researchers from HUN-REN Centre for Energy Research report on the #ALDep of vanadium-monosulphide layers from a novel precursor combination, TEMAV & H2S, resulting in amorphous layers that were crystallized upon annealing in H2S. https://lnkd.in/eDZ84kxr

Cobalt #thinfilms can be used in chip interconnects, magnetic sensors, and antibacterial coatings. Researchers from Germany have developed a novel #ALDep process for metallic cobalt at ultra-low temperatures. #JVSTA https://lnkd.in/eY5na3RZ

Researchers from University of Maryland & ZEISS Group developed a process for highly controlled Ru etching using radical fluxes from an O2/Cl2 remote plasma & electron beam irradiation, and a model that reproduces the observed behavior. https://lnkd.in/e2f2xHf3

Working on revising your manuscript, and not sure how to deal with the reviews you received? Check out this FREE webinar on Responding to Reviewer Comments, April 24, 2025 - REGISTER NOW! #AVSWebinar https://conta.cc/4hFFBeK

For longer-lasting, #corrosion-resistant materials for industrial applications, researchers from North University of China investigated effects of scanning speed on the organization, hardness, & corrosion properties of a CoCrFeNi #HighEntropyAlloy cladding layer on CX stainless steel. https://lnkd.in/ej4hakT2

In this new #JVSTA paper, researchers from University of Michigan develop a digital-twin model of their SALD system integrating fluid flow + surface chemistry, providing insights into the film geometry. #ALDep https://lnkd.in/eePwVArc

Today we congratulate Stefan Zollner, #JVSTB's Most Valuable Reviewer for 2024! Stefan has been a consistent and reliable reviewer for many years and has published with us often. You can read some of his work at the link below. Thank you, Stefan! #peerreview https://lnkd.in/eWmqiugw

#XPS is considered a go-to technique for determining charges on atoms in complex #materials. In this #JVSTA paper, researchers from Pacific Northwest National Laboratory & University of North Texas expose & address a prevailing misconception on how to accurately assign those charges. https://lnkd.in/g6yXjnR9

Researchers from Cornell University present results on #ALDep of Al2O3 using a non-pyrophoric precursor that produces thin films with properties comparable to those found with trimethylaluminum, and exhibiting a similar temperature window. #JVSTA https://lnkd.in/dP8txuSB