Last updated on 2024年8月14日

How do you ensure reliability and quality of MEMS sensors?

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MEMS sensors, or microelectromechanical systems, are tiny devices that combine mechanical and electrical components to measure physical phenomena such as pressure, acceleration, temperature, or sound. They are widely used in applications such as automotive, medical, aerospace, industrial, and consumer electronics. However, MEMS sensors also face challenges such as fabrication variability, environmental stress, aging effects, and calibration errors that can affect their reliability and quality. How do you ensure that your MEMS sensors perform well and meet the specifications and expectations of your customers and end-users? Here are some tips and best practices to follow.

本文章的要点总结

Design for non-linearity:

Incorporating non-linear dynamics into MEMS sensor design ensures better performance under real-world conditions. It's like preparing for a marathon instead of a sprint—you're ready for the long haul.
Embrace data analytics:

Collect extensive data on your sensors to understand their behavior beyond the basics. Think of it as getting to know a friend — the more you know, the better you can anticipate their needs.

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1 Design for reliability

The first step to ensure the reliability and quality of MEMS sensors is to design them with the intended application and operating conditions in mind. This means considering factors such as the sensor type, size, shape, material, packaging, interface, and functionality, as well as the expected performance, accuracy, sensitivity, resolution, range, frequency, power consumption, and lifetime of the sensor. You should also perform simulations, modeling, and testing to verify and optimize the design and identify potential failure modes and mechanisms.

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Kordel France

Artificial Intelligence Architect | Engineer & Researcher building the sense of smell for robotics
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Do not underestimate the power of data. Gather plenty of data for each sensor you are assessing to help understand the sensor's consistency, drift, and variability. This will help you better understand the limitations of its performance outside of the data sheet.

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2 Follow fabrication standards

The second step to ensure the reliability and quality of MEMS sensors is to follow the fabrication standards and processes that are appropriate for the sensor technology and application. This means choosing the right fabrication method, such as surface micromachining, bulk micromachining, or wafer bonding, and ensuring the quality and consistency of the materials, equipment, and procedures involved. You should also implement quality control and inspection methods, such as optical microscopy, scanning electron microscopy, or profilometry, to detect and eliminate defects and deviations in the fabrication process.

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3 Perform rigorous testing

The third step to ensure the reliability and quality of MEMS sensors is to perform rigorous testing and characterization of the sensor performance and behavior under various conditions. This means applying different stimuli, such as mechanical, thermal, electrical, or chemical, and measuring the sensor output, such as voltage, current, resistance, or capacitance, to evaluate the sensor functionality, linearity, repeatability, hysteresis, drift, noise, and stability. You should also perform accelerated aging and stress tests, such as temperature cycling, humidity cycling, shock, vibration, or radiation, to assess the sensor durability, robustness, and reliability over time.

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Kordel France

Artificial Intelligence Architect | Engineer & Researcher building the sense of smell for robotics
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Perform drift testing. Drift is the sensor's affinity to move away from consistent measurements after continuous use. The best way to get started with this is to just run the sensor for an extended period of time and analyze the same metric over and over again. As a simple example, if you're looking at an accelerometer sensor, try monitoring on a flat, still surface for several minutes in a row to make sure the sensor consistently reads 9.81 m/s2 or 1G without drifting.

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4 Calibrate and compensate

The fourth step to ensure the reliability and quality of MEMS sensors is to calibrate and compensate for the sensor output variations and errors that may arise from fabrication variability, environmental stress, aging effects, or interference. This means applying correction factors, algorithms, or feedback loops to adjust the sensor output to match the true physical value or the desired reference value. You should also perform regular calibration and compensation procedures, such as zero-point calibration, span calibration, temperature compensation, or cross-axis compensation, to maintain the sensor accuracy and precision over time.

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Kordel France

Artificial Intelligence Architect | Engineer & Researcher building the sense of smell for robotics
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Many MEMS sensors will drift with time and it is important to have a common standard or baseline from which to measure the same metric to characterize how much the drift is. Try to regularly re-calibrate or re-assess your baseline metric to ensure the sensor is still performing within expectations.

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5 Monitor and maintain

The fifth step to ensure the reliability and quality of MEMS sensors is to monitor and maintain the sensor performance and condition during operation and use. This means collecting and analyzing the sensor data, such as output signals, error codes, or diagnostic information, to detect and diagnose any anomalies, malfunctions, or failures that may occur in the sensor system. You should also perform preventive and corrective maintenance actions, such as cleaning, replacing, or repairing the sensor components or modules, to restore and improve the sensor functionality and quality.

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6 Follow best practices

The sixth step to ensure the reliability and quality of MEMS sensors is to follow the best practices and recommendations that are specific to the sensor technology and application. This means consulting the sensor datasheets, manuals, guidelines, or standards that provide the detailed information and instructions on how to design, fabricate, test, calibrate, compensate, monitor, and maintain the sensor system. You should also follow the safety and ethical principles and regulations that apply to the sensor use and disposal.

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7 Here’s what else to consider

This is a space to share examples, stories, or insights that don’t fit into any of the previous sections. What else would you like to add?

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Daniel Granados

Director of Cluster for Technological Innovation and Talent in Semiconductors @ Madrid CITT-CHIP | Nanofabrication, Clean Room Management, Quantum Devices Group Leader at IMDEA-Nano
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Understanding the behavior of MEMS and NEMS in their non-linear regime is crucial. Often, the non-linear characteristics of these systems are overlooked, and linear approximations are used instead. However, these linear models fail to capture the true dynamics and operational intricacies of MEMS and NEMS. Non-linearities can significantly impact their performance, stability, and reliability, particularly under real-world operating conditions where they are subjected to complex forces and interactions. A thorough analysis in the non-linear regime provides a more accurate and reliable understanding, which is essential for designing and optimizing these systems for practical applications.

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How do you ensure reliability and quality of MEMS sensors?

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3

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1 Design for reliability

2 Follow fabrication standards

3 Perform rigorous testing

4 Calibrate and compensate

5 Monitor and maintain

6 Follow best practices

7 Here’s what else to consider

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